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About the product
3M™ Betapure™ AUL Series Filter Cartridges represent a new generation in Chemical Mechanical Planarization (CMP) slurry classification providing superior reduction of large particle counts for improved yields. Featuring bi-component fiber technology with targeted multizone filtration layers to enable Large Particle Count (LPC) reduction and yield improvement in the most advanced CMP processes.
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Product name and IDs | 3M ID | Category Name | Overall Width (Imperial) | Overall Length (Imperial) | Overall Length (Metric) | Overall Width (Metric) | Overall Diameter (Imperial) | Overall Diameter (Metric) | Product Type | End Modification | Micron Rating | Filter Type | Filter Technology | Industries | Product Series | Brand |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
3M ID 7100245803 |
Category Name Cylindrical Depth Filter Cartridges |
Overall Width (Imperial) - |
Overall Length (Imperial) 5 in |
Overall Length (Metric) 127 mm |
Overall Width (Metric) - |
Overall Diameter (Imperial) - |
Overall Diameter (Metric) - |
Product Type - |
End Modification - |
Micron Rating 0.05 μm |
Filter Type - |
Filter Technology - |
Industries Biopharmaceutical manufacturing |
Product Series AUL |
Brand Betapure™ |
|
3M ID 7100212302 |
Category Name Cylindrical Depth Filter Cartridges |
Overall Width (Imperial) - |
Overall Length (Imperial) - |
Overall Length (Metric) - |
Overall Width (Metric) - |
Overall Diameter (Imperial) 2.92 in |
Overall Diameter (Metric) 74.168 mm |
Product Type - |
End Modification 222/Flat Cap |
Micron Rating 0.05 μm |
Filter Type - |
Filter Technology - |
Industries Biopharmaceutical manufacturing |
Product Series AUL |
Brand Betapure™ |
|
3M ID 7100180233 |
Category Name Cylindrical Depth Filter Cartridges |
Overall Width (Imperial) - |
Overall Length (Imperial) 10 in |
Overall Length (Metric) 25.4 cm |
Overall Width (Metric) - |
Overall Diameter (Imperial) 2.92 in |
Overall Diameter (Metric) 7.42 cm |
Product Type - |
End Modification 222/Flat Cap |
Micron Rating 0.05 μm |
Filter Type Depth |
Filter Technology Non-woven |
Industries Biopharmaceutical manufacturing |
Product Series AUL |
Brand Betapure™ |
|
3M ID 7100179956 |
Category Name Cylindrical Depth Filter Cartridges |
Overall Width (Imperial) - |
Overall Length (Imperial) 20 in |
Overall Length (Metric) 50.8 cm |
Overall Width (Metric) - |
Overall Diameter (Imperial) 2.92 in |
Overall Diameter (Metric) 7.42 cm |
Product Type - |
End Modification 222/Flat Cap |
Micron Rating 0.05 μm |
Filter Type Depth |
Filter Technology Non-woven |
Industries Biopharmaceutical manufacturing |
Product Series AUL |
Brand Betapure™ |
|
3M ID 7100179275 |
Category Name Cylindrical Depth Filter Cartridges |
Overall Width (Imperial) - |
Overall Length (Imperial) 30 in |
Overall Length (Metric) 76.2 cm |
Overall Width (Metric) - |
Overall Diameter (Imperial) 2.92 in |
Overall Diameter (Metric) 7.42 cm |
Product Type - |
End Modification 222/Flat Cap |
Micron Rating 0.05 μm |
Filter Type Depth |
Filter Technology Non-woven |
Industries Biopharmaceutical manufacturing |
Product Series AUL |
Brand Betapure™ |
|
3M ID 7100179274 |
Category Name Cylindrical Depth Filter Cartridges |
Overall Width (Imperial) - |
Overall Length (Imperial) 5 in |
Overall Length (Metric) 12.7 cm |
Overall Width (Metric) - |
Overall Diameter (Imperial) 2.92 in |
Overall Diameter (Metric) 7.42 cm |
Product Type - |
End Modification 222/Flat Cap |
Micron Rating 0.05 μm |
Filter Type Depth |
Filter Technology Non-woven |
Industries Biopharmaceutical manufacturing |
Product Series AUL |
Brand Betapure™ |
|
3M ID 7100179273 |
Category Name Cylindrical Depth Filter Cartridges |
Overall Width (Imperial) - |
Overall Length (Imperial) 20 in |
Overall Length (Metric) 50.8 cm |
Overall Width (Metric) - |
Overall Diameter (Imperial) 2.92 in |
Overall Diameter (Metric) 7.42 cm |
Product Type - |
End Modification 222/Flat Cap |
Micron Rating 50 μm |
Filter Type Depth |
Filter Technology Non-woven |
Industries Biopharmaceutical manufacturing |
Product Series AUL |
Brand Betapure™ |
|
3M ID 7100179211 |
Category Name Cylindrical Depth Filter Cartridges |
Overall Width (Imperial) - |
Overall Length (Imperial) 10 in |
Overall Length (Metric) 25.4 cm |
Overall Width (Metric) - |
Overall Diameter (Imperial) 2.92 in |
Overall Diameter (Metric) 7.42 cm |
Product Type - |
End Modification 222/Flat Cap |
Micron Rating 0.05 μm |
Filter Type Depth |
Filter Technology Non-woven |
Industries Biopharmaceutical manufacturing |
Product Series AUL |
Brand Betapure™ |
|
3M ID 7100057150 |
Category Name Cylindrical Depth Filter Cartridges |
Overall Width (Imperial) 2.92 in |
Overall Length (Imperial) 20 in |
Overall Length (Metric) 50.8 cm |
Overall Width (Metric) 7.416 cm |
Overall Diameter (Imperial) 2.92 in |
Overall Diameter (Metric) 7.42 cm |
Product Type - |
End Modification 222 connector, flat cap and EPR o-rings. |
Micron Rating 70 μm |
Filter Type Depth |
Filter Technology Non-woven |
Industries Biopharmaceutical manufacturing |
Product Series AUL |
Brand Betapure™ |
|
3M ID 7100046478 |
Category Name Cylindrical Depth Filter Cartridges |
Overall Width (Imperial) 2.92 in |
Overall Length (Imperial) 10 in |
Overall Length (Metric) 25.4 cm |
Overall Width (Metric) 7.416 cm |
Overall Diameter (Imperial) 2.92 in |
Overall Diameter (Metric) 74.168 mm |
Product Type - |
End Modification 222 connector, flat cap and EPR o-rings. |
Micron Rating 0.7 μm |
Filter Type Depth |
Filter Technology Non-woven |
Industries Biopharmaceutical manufacturing |
Product Series AUL |
Brand Betapure™ |
|
3M ID 7010381675 |
Category Name Cylindrical Depth Filter Cartridges |
Overall Width (Imperial) 2.92 in |
Overall Length (Imperial) 30 in |
Overall Length (Metric) 76.2 cm |
Overall Width (Metric) 7.416 cm |
Overall Diameter (Imperial) 2.92 in |
Overall Diameter (Metric) 7.42 cm |
Product Type - |
End Modification 222 connector, flat cap and EPR o-rings. |
Micron Rating 70 μm |
Filter Type Depth |
Filter Technology Non-woven |
Industries Biopharmaceutical manufacturing |
Product Series AUL |
Brand Betapure™ |
|
3M ID 7010381673 |
Category Name Cylindrical Depth Filter Cartridges |
Overall Width (Imperial) 2.92 in |
Overall Length (Imperial) 5 in |
Overall Length (Metric) 12.7 cm |
Overall Width (Metric) 7.416 cm |
Overall Diameter (Imperial) 2.92 in |
Overall Diameter (Metric) 74.168 mm |
Product Type - |
End Modification 222 connector, flat cap and EPR o-rings. |
Micron Rating 0.7 μm |
Filter Type Depth |
Filter Technology Non-woven |
Industries Biopharmaceutical manufacturing |
Product Series AUL |
Brand Betapure™ |
|
3M ID 7010339222 |
Category Name Cylindrical Depth Filter Cartridges |
Overall Width (Imperial) - |
Overall Length (Imperial) 10 in |
Overall Length (Metric) 25.4 cm |
Overall Width (Metric) - |
Overall Diameter (Imperial) - |
Overall Diameter (Metric) - |
Product Type Filter Cartridge |
End Modification - |
Micron Rating 0.7 μm |
Filter Type - |
Filter Technology - |
Industries Biopharmaceutical manufacturing |
Product Series - |
Brand Betapure™ |
|
3M ID 7010303354 |
Category Name Cylindrical Depth Filter Cartridges |
Overall Width (Imperial) - |
Overall Length (Imperial) 20 in |
Overall Length (Metric) 50.8 cm |
Overall Width (Metric) - |
Overall Diameter (Imperial) - |
Overall Diameter (Metric) - |
Product Type Filter Cartridge |
End Modification - |
Micron Rating 0.7 μm |
Filter Type - |
Filter Technology - |
Industries Biopharmaceutical manufacturing |
Product Series - |
Brand Betapure™ |
3M™ Betapure™ AUL Series filter cartridges represent a new generation in Chemical Mechanical Planarization (CMP) slurry classification providing superior reduction of large particle counts for improved yields. Featuring 3M’s bi-component fiber technology with targeted multi-zone filtration layers enable Large Particle Count (LPC) reduction and yield improvement in the most advanced CMP processes.
Our filter is specifically designed to have a rigid filter structure which retains consistent pore size even under intermittent process conditions. Changes such as those caused by pump fluctuations, stopping and restarting the system, or high differential pressure will have minimal, if any effect on product consistency. Depth filtration reduces LPCs, and provides superior classification of slurry particles to help minimize scratching and chatter marks.
The targeted multi-zone construction optimizes both LPC reduction and enhanced flow characteristics, including extremely low pressure drop, to minimize shearing of the slurry while providing superior service life.
3M™ Betapure™ AUL Series Filter Cartridges are available in 5”, 10”, 20”, and 30” lengths with 222 connector, flat cap, and EPR o-rings, and in a 10” double open-end filter with polyethylene foam end caps.
Industries |
Industries
Biopharmaceutical manufacturing |
Category Name |
Category Name
Cylindrical Depth Filter Cartridges |
Filter Technology |
Filter Technology
Non-woven |
Micron Rating |
Micron Rating
0.7 μm, 0.05 μm, 70 μm, 50 μm |
Product Series |
Product Series
AUL |
Brand |
Brand
Betapure™ |
Overall Length (Imperial) |
Overall Length (Imperial)
10 in, 20 in, 5 in, 30 in |
Overall Diameter (Imperial) |
Overall Diameter (Imperial)
2.92 in |
Overall Width (Metric) |
Overall Width (Metric)
7.416 cm |
Overall Length (Metric) |
Overall Length (Metric)
25.4 cm, 50.8 cm, 12.7 cm, 127 mm, 76.2 cm |
Product Type |
Product Type
Filter Cartridge |
Overall Diameter (Metric) |
Overall Diameter (Metric)
7.42 cm, 74.168 mm |
End Modification |
End Modification
222/Flat Cap, 222 connector, flat cap and EPR o-rings. |
Filter Type |
Filter Type
Depth |
Overall Width (Imperial) |
Overall Width (Imperial)
2.92 in |
Partner name | Primary contact - Email | Primary contact - Phone | Website |
---|---|---|---|
Eggelhof Incorporated | bellis@eggelhof.com | 832-301-0966 | https://www.eggelhof.com/ |
King Filtration Technologies, Inc. | jim.seidel@kingfiltration.com | 314-452-4789 | https://www.kingfiltration.com/ |
Rawson | mike.mercier@rawsonlp.com | 404-281-5704 | https://rawsonicd.com/ |
Danner Associates | bdanner@dannerassoc.com | 781-982-7020 | |
Ryan Herco | blucas@rhfs.com | 612-889-9248 | https://www.rhfs.com/ |