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3M™ Betapure™ AUL Series Filter Cartridge

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3M™ Betapure™ AUL Series Filter Cartridge

About the product

3M™ Betapure™ AUL Series Filter Cartridges represent a new generation in Chemical Mechanical Planarization (CMP) slurry classification providing superior reduction of large particle counts for improved yields. Featuring bi-component fiber technology with targeted multizone filtration layers to enable Large Particle Count (LPC) reduction and yield improvement in the most advanced CMP processes.

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Product name and IDs 3M ID Category Name Overall Width (Imperial) Overall Length (Imperial) Overall Length (Metric) Overall Width (Metric) Overall Diameter (Imperial) Overall Diameter (Metric) Product Type End Modification Micron Rating Filter Type Filter Technology Industries Product Series Brand

3M ID

7100245803

Category Name

Cylindrical Depth Filter Cartridges

Overall Width (Imperial)

-

Overall Length (Imperial)

5 in

Overall Length (Metric)

127 mm

Overall Width (Metric)

-

Overall Diameter (Imperial)

-

Overall Diameter (Metric)

-

Product Type

-

End Modification

-

Micron Rating

0.05 μm

Filter Type

-

Filter Technology

-

Industries

Biopharmaceutical manufacturing

Product Series

AUL

Brand

Betapure™

3M ID

7100212302

Category Name

Cylindrical Depth Filter Cartridges

Overall Width (Imperial)

-

Overall Length (Imperial)

-

Overall Length (Metric)

-

Overall Width (Metric)

-

Overall Diameter (Imperial)

2.92 in

Overall Diameter (Metric)

74.168 mm

Product Type

-

End Modification

222/Flat Cap

Micron Rating

0.05 μm

Filter Type

-

Filter Technology

-

Industries

Biopharmaceutical manufacturing

Product Series

AUL

Brand

Betapure™

3M ID

7100180233

Category Name

Cylindrical Depth Filter Cartridges

Overall Width (Imperial)

-

Overall Length (Imperial)

10 in

Overall Length (Metric)

25.4 cm

Overall Width (Metric)

-

Overall Diameter (Imperial)

2.92 in

Overall Diameter (Metric)

7.42 cm

Product Type

-

End Modification

222/Flat Cap

Micron Rating

0.05 μm

Filter Type

Depth

Filter Technology

Non-woven

Industries

Biopharmaceutical manufacturing

Product Series

AUL

Brand

Betapure™

3M ID

7100179956

Category Name

Cylindrical Depth Filter Cartridges

Overall Width (Imperial)

-

Overall Length (Imperial)

20 in

Overall Length (Metric)

50.8 cm

Overall Width (Metric)

-

Overall Diameter (Imperial)

2.92 in

Overall Diameter (Metric)

7.42 cm

Product Type

-

End Modification

222/Flat Cap

Micron Rating

0.05 μm

Filter Type

Depth

Filter Technology

Non-woven

Industries

Biopharmaceutical manufacturing

Product Series

AUL

Brand

Betapure™

3M ID

7100179275

Category Name

Cylindrical Depth Filter Cartridges

Overall Width (Imperial)

-

Overall Length (Imperial)

30 in

Overall Length (Metric)

76.2 cm

Overall Width (Metric)

-

Overall Diameter (Imperial)

2.92 in

Overall Diameter (Metric)

7.42 cm

Product Type

-

End Modification

222/Flat Cap

Micron Rating

0.05 μm

Filter Type

Depth

Filter Technology

Non-woven

Industries

Biopharmaceutical manufacturing

Product Series

AUL

Brand

Betapure™

3M ID

7100179274

Category Name

Cylindrical Depth Filter Cartridges

Overall Width (Imperial)

-

Overall Length (Imperial)

5 in

Overall Length (Metric)

12.7 cm

Overall Width (Metric)

-

Overall Diameter (Imperial)

2.92 in

Overall Diameter (Metric)

7.42 cm

Product Type

-

End Modification

222/Flat Cap

Micron Rating

0.05 μm

Filter Type

Depth

Filter Technology

Non-woven

Industries

Biopharmaceutical manufacturing

Product Series

AUL

Brand

Betapure™

3M ID

7100179273

Category Name

Cylindrical Depth Filter Cartridges

Overall Width (Imperial)

-

Overall Length (Imperial)

20 in

Overall Length (Metric)

50.8 cm

Overall Width (Metric)

-

Overall Diameter (Imperial)

2.92 in

Overall Diameter (Metric)

7.42 cm

Product Type

-

End Modification

222/Flat Cap

Micron Rating

50 μm

Filter Type

Depth

Filter Technology

Non-woven

Industries

Biopharmaceutical manufacturing

Product Series

AUL

Brand

Betapure™

3M ID

7100179211

Category Name

Cylindrical Depth Filter Cartridges

Overall Width (Imperial)

-

Overall Length (Imperial)

10 in

Overall Length (Metric)

25.4 cm

Overall Width (Metric)

-

Overall Diameter (Imperial)

2.92 in

Overall Diameter (Metric)

7.42 cm

Product Type

-

End Modification

222/Flat Cap

Micron Rating

0.05 μm

Filter Type

Depth

Filter Technology

Non-woven

Industries

Biopharmaceutical manufacturing

Product Series

AUL

Brand

Betapure™

3M ID

7100057150

Category Name

Cylindrical Depth Filter Cartridges

Overall Width (Imperial)

2.92 in

Overall Length (Imperial)

20 in

Overall Length (Metric)

50.8 cm

Overall Width (Metric)

7.416 cm

Overall Diameter (Imperial)

2.92 in

Overall Diameter (Metric)

7.42 cm

Product Type

-

End Modification

222 connector, flat cap and EPR o-rings.

Micron Rating

70 μm

Filter Type

Depth

Filter Technology

Non-woven

Industries

Biopharmaceutical manufacturing

Product Series

AUL

Brand

Betapure™

3M ID

7100046478

Category Name

Cylindrical Depth Filter Cartridges

Overall Width (Imperial)

2.92 in

Overall Length (Imperial)

10 in

Overall Length (Metric)

25.4 cm

Overall Width (Metric)

7.416 cm

Overall Diameter (Imperial)

2.92 in

Overall Diameter (Metric)

74.168 mm

Product Type

-

End Modification

222 connector, flat cap and EPR o-rings.

Micron Rating

0.7 μm

Filter Type

Depth

Filter Technology

Non-woven

Industries

Biopharmaceutical manufacturing

Product Series

AUL

Brand

Betapure™

3M ID

7010381675

Category Name

Cylindrical Depth Filter Cartridges

Overall Width (Imperial)

2.92 in

Overall Length (Imperial)

30 in

Overall Length (Metric)

76.2 cm

Overall Width (Metric)

7.416 cm

Overall Diameter (Imperial)

2.92 in

Overall Diameter (Metric)

7.42 cm

Product Type

-

End Modification

222 connector, flat cap and EPR o-rings.

Micron Rating

70 μm

Filter Type

Depth

Filter Technology

Non-woven

Industries

Biopharmaceutical manufacturing

Product Series

AUL

Brand

Betapure™

3M ID

7010381673

Category Name

Cylindrical Depth Filter Cartridges

Overall Width (Imperial)

2.92 in

Overall Length (Imperial)

5 in

Overall Length (Metric)

12.7 cm

Overall Width (Metric)

7.416 cm

Overall Diameter (Imperial)

2.92 in

Overall Diameter (Metric)

74.168 mm

Product Type

-

End Modification

222 connector, flat cap and EPR o-rings.

Micron Rating

0.7 μm

Filter Type

Depth

Filter Technology

Non-woven

Industries

Biopharmaceutical manufacturing

Product Series

AUL

Brand

Betapure™

3M ID

7010339222

Category Name

Cylindrical Depth Filter Cartridges

Overall Width (Imperial)

-

Overall Length (Imperial)

10 in

Overall Length (Metric)

25.4 cm

Overall Width (Metric)

-

Overall Diameter (Imperial)

-

Overall Diameter (Metric)

-

Product Type

Filter Cartridge

End Modification

-

Micron Rating

0.7 μm

Filter Type

-

Filter Technology

-

Industries

Biopharmaceutical manufacturing

Product Series

-

Brand

Betapure™

3M ID

7010303354

Category Name

Cylindrical Depth Filter Cartridges

Overall Width (Imperial)

-

Overall Length (Imperial)

20 in

Overall Length (Metric)

50.8 cm

Overall Width (Metric)

-

Overall Diameter (Imperial)

-

Overall Diameter (Metric)

-

Product Type

Filter Cartridge

End Modification

-

Micron Rating

0.7 μm

Filter Type

-

Filter Technology

-

Industries

Biopharmaceutical manufacturing

Product Series

-

Brand

Betapure™

Product details

3M™ Betapure™ AUL Series filter cartridges represent a new generation in Chemical Mechanical Planarization (CMP) slurry classification providing superior reduction of large particle counts for improved yields. Featuring 3M’s bi-component fiber technology with targeted multi-zone filtration layers enable Large Particle Count (LPC) reduction and yield improvement in the most advanced CMP processes.

Our filter is specifically designed to have a rigid filter structure which retains consistent pore size even under intermittent process conditions. Changes such as those caused by pump fluctuations, stopping and restarting the system, or high differential pressure will have minimal, if any effect on product consistency. Depth filtration reduces LPCs, and provides superior classification of slurry particles to help minimize scratching and chatter marks.

The targeted multi-zone construction optimizes both LPC reduction and enhanced flow characteristics, including extremely low pressure drop, to minimize shearing of the slurry while providing superior service life.

3M™ Betapure™ AUL Series Filter Cartridges are available in 5”, 10”, 20”, and 30” lengths with 222 connector, flat cap, and EPR o-rings, and in a 10” double open-end filter with polyethylene foam end caps.

  • Classification filter designed for Chemical Mechanical Planarization (CMP) slurry classification
  • Bi-component fiber technology with targeted multizone filtration layers enable Large Particle Count (LPC) reduction
  • The rigid filter structure maintains pore size even under intermittent process conditions, providing consistent filtration

Product specifications

Industries
Industries

Biopharmaceutical manufacturing

Category Name
Category Name

Cylindrical Depth Filter Cartridges

Filter Technology
Filter Technology

Non-woven

Micron Rating
Micron Rating

0.7 μm, 0.05 μm, 70 μm, 50 μm

Product Series
Product Series

AUL

Brand
Brand

Betapure™

Overall Length (Imperial)
Overall Length (Imperial)

10 in, 20 in, 5 in, 30 in

Overall Diameter (Imperial)
Overall Diameter (Imperial)

2.92 in

Overall Width (Metric)
Overall Width (Metric)

7.416 cm

Overall Length (Metric)
Overall Length (Metric)

25.4 cm, 50.8 cm, 12.7 cm, 127 mm, 76.2 cm

Product Type
Product Type

Filter Cartridge

Overall Diameter (Metric)
Overall Diameter (Metric)

7.42 cm, 74.168 mm

End Modification
End Modification

222/Flat Cap, 222 connector, flat cap and EPR o-rings.

Filter Type
Filter Type

Depth

Overall Width (Imperial)
Overall Width (Imperial)

2.92 in

Manufacturing distributors

Distributors

BP PDP

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