3M™ Betapure™ AUL Series Filter Cartridge
Solventum’s Purification and Filtration Business is now a part of Thermo Fisher Scientific. Drinking Water Filtration remains with Solventum. For more information, please visit here.
About the product
3M™ Betapure™ AUL Series Filter Cartridges represent a new generation in Chemical Mechanical Planarization (CMP) slurry classification providing superior reduction of large particle counts for improved yields. Featuring bi-component fiber technology with targeted multizone filtration layers to enable Large Particle Count (LPC) reduction and yield improvement in the most advanced CMP processes.
Product details
3M™ Betapure™ AUL Series filter cartridges represent a new generation in Chemical Mechanical Planarization (CMP) slurry classification providing superior reduction of large particle counts for improved yields. Featuring 3M’s bi-component fiber technology with targeted multi-zone filtration layers enable Large Particle Count (LPC) reduction and yield improvement in the most advanced CMP processes.
Our filter is specifically designed to have a rigid filter structure which retains consistent pore size even under intermittent process conditions. Changes such as those caused by pump fluctuations, stopping and restarting the system, or high differential pressure will have minimal, if any effect on product consistency. Depth filtration reduces LPCs, and provides superior classification of slurry particles to help minimize scratching and chatter marks.
The targeted multi-zone construction optimizes both LPC reduction and enhanced flow characteristics, including extremely low pressure drop, to minimize shearing of the slurry while providing superior service life.
3M™ Betapure™ AUL Series Filter Cartridges are available in 5”, 10”, 20”, and 30” lengths with 222 connector, flat cap, and EPR o-rings, and in a 10” double open-end filter with polyethylene foam end caps.
- Classification filter designed for Chemical Mechanical Planarization (CMP) slurry classification
- Bi-component fiber technology with targeted multizone filtration layers enable Large Particle Count (LPC) reduction
- The rigid filter structure maintains pore size even under intermittent process conditions, providing consistent filtration
Product specifications
| Industries |
Industries
Manufacturing,Microelectronics,Semiconductor manufacturing |
| OverallLengthImperial |
OverallLengthImperial
2 in, 10 in |
| Filter Technology |
Filter Technology
Non-woven |
| Micron Rating |
Micron Rating
0.7 μm, 0.05 μm, 0.007 μm, 70 μm, 0.006 μm |
| OverallDiameterImperial |
OverallDiameterImperial
2.92 in |
| Product Series |
Product Series
AUL |
| categoryName |
categoryName
Cylindrical Depth Filter Cartridges |
| OverallLengthMetric |
OverallLengthMetric
25.4 cm |
| End Modification |
End Modification
222/Flat Cap, 222 connector, flat cap and EPR o-rings. |
| Category name |
Category name
Cylindrical Depth Filter Cartridges |
| Trademark2 |
Trademark2
Betapure™ |
| MicronRating |
MicronRating
70 μm, 50 μm |
| Catalog number |
Catalog number
AUL10Z13UC007, AUL20Z15UCSF5, AUL02Z13VC007, AUL20Z13FC007, AU10Z15UCSF6, AUL05Z13FC007, AUL05Z15FCSF5-DG2, AUL10Z15UCSF5, AUL30Z15FCSF5, AUL30Z13FC007, AUL20Z15FCSF5, AU02Z15FCSF6, AUL10Z15FCSF5, AUL10Z13FC007 |
| Brand |
Brand
Betapure™ |
| FilterType |
FilterType
Depth |
| Overall Length (Imperial) |
Overall Length (Imperial)
10 in, 20 in, 2 in, 5 in, 30 in |
| Overall Diameter (Imperial) |
Overall Diameter (Imperial)
2.92 in, 2.5 in |
| Overall Width (Metric) |
Overall Width (Metric)
7.416 cm |
| Overall Length (Metric) |
Overall Length (Metric)
25.4 cm, 50.8 cm, 50.8 mm, 12.7 cm, 127 mm, 76.2 cm |
| Product Type |
Product Type
Filter Cartridge |
| OverallWidthImperial |
OverallWidthImperial
2.92 in |
| GLBL_CAT_NBR |
GLBL_CAT_NBR
AUL20Z13UC007, AUL05Z15FCSF5, AUL02Z15VCSF5 |
| Overall Diameter (Metric) |
Overall Diameter (Metric)
7.42 cm, 74.168 mm, 6.35 cm |
| Filter Type |
Filter Type
Depth |
| Overall Width (Imperial) |
Overall Width (Imperial)
2.92 in |
| FilterTechnology |
FilterTechnology
Non-woven |
Distributors
| Solventum Filtration Distributor | Headquarter Location | Contact | Contact Email | Contact Phone | Website |
|---|---|---|---|---|---|
| A.M. Fluid Equipment, Inc. | Bethany, CT | Ross Nelson | ross.nelson@amfe-filter.com | 203-393-2360 | https://amfluid.com |
| BMB Filtration | Jacksonville, FL | Butch Lee | butch@bmbent.net | 904-880-7925 | https://bmbfiltration.com/ |
| Calhoun & De Jong, Inc. | Portland, OR; Seattle, WA | Ed Calhoun | ed@cdisales.com | 1-866-288-5091 | https://cdisales.com |
| C.C. Day Company | Minneapolis, MN | Chris Magnine | cmagnine@ccday.com | 763-350-3415 | https://ccday.com |
| Danner Associates | Rockland, MA | Brian Danner | bdanner@dannerassoc.com | 781-982-7020 | https://www.dannerassociates.com/ |
| Eggelhof Incorporated | Houston, TX | Ben Ellis | bellis@eggelhof.com | 832-301-0966 | https://www.eggelhof.com/ |
| Enpro Inc. | Addison, IL | John Burnett | john_burnett@enproinc.com | 314-378-6829 | https://enpro.com/ |
| Filter Equipment Co., Inc. | Wall, NJ | Scott Groh | scgroh@filter-equipment.com | 908-216-3879 | http://www.filter-equipment.com/ |
| George Yardley Company | Santa Ana, CA | Rob Yardley | rob@georgeyardley.com | 714-241-7700 | https://georgeyardley.com/ |
| Hagedorn & Gannon Co., Inc. | Fenton, MO | Ty Van Buren | tvanburen@hgcoinc.com | 636-349-3370 | https://www.hgcoinc.com/ |
| Hatfield and Company, Inc. | Rockwall, TX | Jason Reed | jreed@hatfieldandcompany.com | 832-671-9719 | https://www.hatfieldandcompany.com/ |
| MSC Industrial Supply | Melville, NY | Jim Keating | jim.keating@mscdirect.com | 440-656-8042 | https://www.mscdirect.com/ |
| Pack-n-Tape | Lafayette, CO | Lisa Higginbotham | lhigginbotham@pack-n-tape.com | 888-262-1988 | https://pack-n-tape.com/ |
| Rawson Industrial Controls | Daphne, AL | Mike Mercier | mike.mercier@rawsonlp.com | 404-281-5704 | https://rawsonicd.com/ |
| Ryan Herco Flow Solutions | Santa Ana, CA | Bob Lucas | blucas@rhfs.com | 612-889-9248 | https://www.rhfs.com/ |
| SunSource | Addison, IL | Tom Lisy | tom.lisy@sunsrce.com | 440-935-4994 | https://www.sun-source.com/ |
