3M™ Betapure™ AUL Series Filter Capsules
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About the product
3M™ Betapure™ AUL Series Filter Capsules contain 3M™ Betapure AUL filters that represent a new generation in Chemical Mechanical Planarization (CMP) slurry classification providing superior reduction of large particle counts for improved yields.
Product options
1-5 of Products
Select Filters to narrow your product list
| Product name | Product ID | Catalog number | Overall Width (Imperial) | Overall Width (Metric) | Overall Length (Imperial) | Overall Length (Metric) | End Modification | Micron Rating | Product Form | Filter Type | Grade | Filter Technology | Product Series | Brand | Category name |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
|
Product ID 7100255882 |
Catalog number AUZ13020Y0 |
Overall Width (Imperial) - |
Overall Width (Metric) - |
Overall Length (Imperial) 5 in |
Overall Length (Metric) 127 mm |
End Modification - |
Micron Rating 0.2 μm |
Product Form - |
Filter Type - |
Grade - |
Filter Technology - |
Product Series AU |
Brand Betapure™ |
Category name Capsule Filters |
|
|
Product ID 7100255881 |
Catalog number AUZ13020Y0 |
Overall Width (Imperial) - |
Overall Width (Metric) - |
Overall Length (Imperial) 5 in |
Overall Length (Metric) 127 mm |
End Modification - |
Micron Rating 0.2 μm |
Product Form - |
Filter Type - |
Grade - |
Filter Technology - |
Product Series AU |
Brand Betapure™ |
Category name Capsule Filters |
|
|
Product ID 7100206450 |
Catalog number AUZ13020Y02RC01 |
Overall Width (Imperial) - |
Overall Width (Metric) - |
Overall Length (Imperial) 2 in |
Overall Length (Metric) 50.8 mm |
End Modification 1/4" Flaretek |
Micron Rating 0.2 μm |
Product Form Capsule |
Filter Type - |
Grade 0.2 micron |
Filter Technology - |
Product Series AUL |
Brand Betapure™ |
Category name Capsule Filters |
|
|
Product ID 7100206411 |
Catalog number AULZ15SF5Y02RC01 |
Overall Width (Imperial) - |
Overall Width (Metric) - |
Overall Length (Imperial) 2 in |
Overall Length (Metric) 50.8 mm |
End Modification 1/4" Flaretek |
Micron Rating 0.005 μm |
Product Form Capsule |
Filter Type - |
Grade - |
Filter Technology - |
Product Series AUL |
Brand Betapure™ |
Category name Capsule Filters |
|
|
Product ID 7100203037 |
Catalog number AULZ13007Y02RC01 |
Overall Width (Imperial) - |
Overall Width (Metric) - |
Overall Length (Imperial) 2 in |
Overall Length (Metric) 50.8 mm |
End Modification 1/4" Flaretek |
Micron Rating 0.07 μm |
Product Form - |
Filter Type - |
Grade - |
Filter Technology - |
Product Series AUL |
Brand Betapure™ |
Category name Capsule Filters |
|
|
Product ID 7100203033 |
Catalog number AUZ15SF6Y02RC01 |
Overall Width (Imperial) - |
Overall Width (Metric) - |
Overall Length (Imperial) 2 in |
Overall Length (Metric) 50.8 mm |
End Modification 1/4" Flaretek |
Micron Rating 0.006 μm |
Product Form - |
Filter Type - |
Grade - |
Filter Technology - |
Product Series AUL |
Brand Betapure™ |
Category name Capsule Filters |
|
|
Product ID 7100180792 |
Catalog number AUZ15SF6Y04PC01 |
Overall Width (Imperial) - |
Overall Width (Metric) - |
Overall Length (Imperial) 5 in |
Overall Length (Metric) 12.7 cm |
End Modification 1/4" Flaretek |
Micron Rating 0.6 μm |
Product Form - |
Filter Type Depth |
Grade 0.6 micron |
Filter Technology Non-woven |
Product Series AUL |
Brand Betapure™ |
Category name Capsule Filters |
|
|
Product ID 7100180785 |
Catalog number AUZ15SF6Y04LC01 |
Overall Width (Imperial) - |
Overall Width (Metric) - |
Overall Length (Imperial) 5 in |
Overall Length (Metric) 12.7 cm |
End Modification 1/4" Flaretek |
Micron Rating 0.6 μm |
Product Form - |
Filter Type Depth |
Grade 0.6 micron |
Filter Technology Non-woven |
Product Series AUL |
Brand Betapure™ |
Category name Capsule Filters |
|
|
Product ID 7100180784 |
Catalog number AULZ15SF5Y10SC01 |
Overall Width (Imperial) - |
Overall Width (Metric) - |
Overall Length (Imperial) 10 in |
Overall Length (Metric) 25.4 cm |
End Modification 1/4" Flaretek |
Micron Rating 0.5 μm |
Product Form - |
Filter Type Depth |
Grade 0.5 micron |
Filter Technology Non-woven |
Product Series AUL |
Brand Betapure™ |
Category name Capsule Filters |
|
|
Product ID 7100180764 |
Catalog number AUZ15SF6Y10LC01 |
Overall Width (Imperial) - |
Overall Width (Metric) - |
Overall Length (Imperial) 10 in |
Overall Length (Metric) 25.4 cm |
End Modification 1/4" Flaretek |
Micron Rating 0.6 μm |
Product Form - |
Filter Type Depth |
Grade 0.6 micron |
Filter Technology Non-woven |
Product Series AUL |
Brand Betapure™ |
Category name Capsule Filters |
|
|
Product ID 7100180722 |
Catalog number AUZ15SF6Y10SC01 |
Overall Width (Imperial) - |
Overall Width (Metric) - |
Overall Length (Imperial) 10 in |
Overall Length (Metric) 25.4 cm |
End Modification 1/4" Flaretek |
Micron Rating 0.6 μm |
Product Form - |
Filter Type Depth |
Grade 0.6 micron |
Filter Technology Non-woven |
Product Series AUL |
Brand Betapure™ |
Category name Capsule Filters |
|
|
Product ID 7100180721 |
Catalog number AULZ15SF5Y10LC01 |
Overall Width (Imperial) - |
Overall Width (Metric) - |
Overall Length (Imperial) 10 in |
Overall Length (Metric) 25.4 cm |
End Modification 1/4" Flaretek |
Micron Rating 0.5 μm |
Product Form - |
Filter Type Depth |
Grade 0.5 micron |
Filter Technology Non-woven |
Product Series AUL |
Brand Betapure™ |
Category name Capsule Filters |
|
|
Product ID 7100180223 |
Catalog number AULZ15SF5Y04PC01 |
Overall Width (Imperial) - |
Overall Width (Metric) - |
Overall Length (Imperial) 5 in |
Overall Length (Metric) 12.7 cm |
End Modification 1/4" Flaretek |
Micron Rating 0.5 μm |
Product Form - |
Filter Type Depth |
Grade 0.5 micron |
Filter Technology Non-woven |
Product Series AUL |
Brand Betapure™ |
Category name Capsule Filters |
|
|
Product ID 7100180212 |
Catalog number AULZ15SF5Y04LC01 |
Overall Width (Imperial) - |
Overall Width (Metric) - |
Overall Length (Imperial) 5 in |
Overall Length (Metric) 12.7 cm |
End Modification 1/4" Flaretek |
Micron Rating 0.5 μm |
Product Form - |
Filter Type Depth |
Grade 0.5 micron |
Filter Technology Non-woven |
Product Series AUL |
Brand Betapure™ |
Category name Capsule Filters |
|
|
Product ID 7100060336 |
Catalog number AULZ13007Y04LC06 |
Overall Width (Imperial) - |
Overall Width (Metric) - |
Overall Length (Imperial) 10 in |
Overall Length (Metric) 25.4 cm |
End Modification 1/4" Flaretek |
Micron Rating 0.7 μm |
Product Form - |
Filter Type Depth |
Grade - |
Filter Technology Non-woven |
Product Series AUL |
Brand Betapure™ |
Category name Capsule Filters |
|
|
Product ID 7100049779 |
Catalog number AULZ13007Y04LC01 |
Overall Width (Imperial) - |
Overall Width (Metric) - |
Overall Length (Imperial) 5 in |
Overall Length (Metric) 12.7 cm |
End Modification 1/4" Flaretek |
Micron Rating 0.7 μm |
Product Form - |
Filter Type Depth |
Grade - |
Filter Technology Non-woven |
Product Series AUL |
Brand Betapure™ |
Category name Capsule Filters |
|
|
Product ID 7100047860 |
Catalog number AULZ13007Y10LC01 |
Overall Width (Imperial) - |
Overall Width (Metric) - |
Overall Length (Imperial) 10 in |
Overall Length (Metric) 254 mm |
End Modification 1/4" Flaretek |
Micron Rating 0.07 μm |
Product Form - |
Filter Type Depth |
Grade - |
Filter Technology Non-woven |
Product Series AUL |
Brand Betapure™ |
Category name Capsule Filters |
|
|
Product ID 7010411170 |
Catalog number AULZ13007Y10SC01 |
Overall Width (Imperial) 2.92 in |
Overall Width (Metric) 7.4168 cm |
Overall Length (Imperial) 10 in |
Overall Length (Metric) 25.4 cm |
End Modification 1/4" Flaretek |
Micron Rating 0.7 μm |
Product Form - |
Filter Type Depth |
Grade - |
Filter Technology Non-woven |
Product Series AUL |
Brand Betapure™ |
Category name Capsule Filters |
|
|
Product ID 7010340518 |
Catalog number AULZ13007Y04PC01 |
Overall Width (Imperial) 2.92 in |
Overall Width (Metric) 7.4168 cm |
Overall Length (Imperial) 5 in |
Overall Length (Metric) 12.7 cm |
End Modification 1/4" Flaretek |
Micron Rating 0.7 μm |
Product Form - |
Filter Type Depth |
Grade - |
Filter Technology Non-woven |
Product Series AUL |
Brand Betapure™ |
Category name Capsule Filters |
Product details
3M™ Betapure™ AUL Series Filter Capsules represent a new generation in Chemical Mechanical Planarization (CMP) slurry classification providing superior reduction of large particle counts for improved yields. 3M bi-component fiber technology with targeted multi-zone filtration layers enables Large Particle Count (LPC) reduction and yield improvement in the most advanced CMP processes. Our filter is specifically designed to have a rigid filter structure which retains consistent pore size even under intermittent process conditions. Changes such as those caused by pump fluctuations, stopping and restarting the system, or high differential pressure will have minimal, if any, effect on product consistency. Depth filtration reduces LPCs and provides superior classification of slurry particles to help minimize scratching and chatter marks. The targeted multi-zone construction optimizes both LPC reduction and enhanced flow characteristics, including extremely low pressure drop, to minimize shearing of the slurry while providing superior service life.
3M™ Betapure™ AUL Series Filter capsules are available in 5” or 10” nominal lengths with Flaretek® or NPT fittings.
FLARETEK® is a trademark of Entegris, Inc
A History of Innovation
For more than a century, 3M has applied innovation and technology to improve customers’ lives and support their business goals. From its headquarters in St. Paul, Minnesota, 3M serves industrial and commercial customers and consumers in nearly 200 countries. Across thousands of products, the 3M brand represents consistency, superior quality, and value. The 3M success begins with a culture of creative collaboration that inspires a never-ending stream of powerful technologies and product solutions that make life better. 3M has an ability to apply technologies – often in combination – to an endless array of real-world customer needs. Of course, all of this is made possible by the people of 3M and a singular commitment to make life easier and better for people around the world. Toward that end, 3M is committed to providing innovative, cost-effective products that help protect people, equipment and the environment. 3M Purification Inc. (formerly CUNO Incorporated) provides filtration and separation solutions for residential, foodservice, science labs, industrial, marine and other applications.
- Classification filter designed for Chemical Mechanical Planarization (CMP) slurry classification
- Bi-component fiber technology with targeted multizone filtration layers enables Large Particle Count (LPC) reduction
- Rigid filter structure maintains pore size even under intermittent process conditions for consistent filtration
Product specifications
| Product Form |
Product Form
Capsule |
| Filter Technology |
Filter Technology
Non-woven |
| Micron Rating |
Micron Rating
0.2 μm, 0.005 μm, 0.6 μm, 0.006 μm, 0.7 μm, 0.5 μm, 0.07 μm |
| Catalog number |
Catalog number
AUZ13020Y0, AULZ15SF5Y02RC01, AUZ13020Y02RC01, AUZ15SF6Y10SC01, AUZ15SF6Y02RC01, AUZ15SF6Y04LC01, AULZ13007Y10SC01, AULZ15SF5Y10SC01, AULZ15SF5Y04PC01, AULZ15SF5Y04LC01, AULZ15SF5Y10LC01, AULZ13007Y02RC01, AUZ15SF6Y10LC01, AUZ15SF6Y04PC01, AULZ13007Y04LC06, AULZ13007Y04LC01, AULZ13007Y10LC01, AULZ13007Y04PC01 |
| Product Series |
Product Series
AU, AUL |
| Grade |
Grade
0.2 micron, 0.6 micron, 0.5 micron |
| EndModification |
EndModification
1/4" Flaretek |
| Brand |
Brand
Betapure™ |
| OverallLengthMetric |
OverallLengthMetric
25.4 cm |
| FilterType |
FilterType
Depth |
| Overall Length (Imperial) |
Overall Length (Imperial)
5 in, 2 in, 10 in |
| Overall Width (Metric) |
Overall Width (Metric)
7.4168 cm |
| Overall Length (Metric) |
Overall Length (Metric)
127 mm, 50.8 mm, 25.4 cm, 12.7 cm, 254 mm |
| OverallWidthImperial |
OverallWidthImperial
2.92 in |
| End Modification |
End Modification
1/4" Flaretek |
| Category name |
Category name
Capsule Filters |
| Filter Type |
Filter Type
Depth |
| ProductSeries |
ProductSeries
AUL |
| Trademark2 |
Trademark2
Betapure™ |
| Overall Width (Imperial) |
Overall Width (Imperial)
2.92 in |
