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3M™ Betapure™ AUL Series Filter Cartridge

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3M™ Betapure™ AUL Series Filter Cartridge

About the product

3M™ Betapure™ AUL Series Filter Cartridges represent a new generation in Chemical Mechanical Planarization (CMP) slurry classification providing superior reduction of large particle counts for improved yields. Featuring bi-component fiber technology with targeted multizone filtration layers to enable Large Particle Count (LPC) reduction and yield improvement in the most advanced CMP processes.

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Product details

3M™ Betapure™ AUL Series filter cartridges represent a new generation in Chemical Mechanical Planarization (CMP) slurry classification providing superior reduction of large particle counts for improved yields. Featuring 3M’s bi-component fiber technology with targeted multi-zone filtration layers enable Large Particle Count (LPC) reduction and yield improvement in the most advanced CMP processes.

Our filter is specifically designed to have a rigid filter structure which retains consistent pore size even under intermittent process conditions. Changes such as those caused by pump fluctuations, stopping and restarting the system, or high differential pressure will have minimal, if any effect on product consistency. Depth filtration reduces LPCs, and provides superior classification of slurry particles to help minimize scratching and chatter marks.

The targeted multi-zone construction optimizes both LPC reduction and enhanced flow characteristics, including extremely low pressure drop, to minimize shearing of the slurry while providing superior service life.

3M™ Betapure™ AUL Series Filter Cartridges are available in 5”, 10”, 20”, and 30” lengths with 222 connector, flat cap, and EPR o-rings, and in a 10” double open-end filter with polyethylene foam end caps.

  • Classification filter designed for Chemical Mechanical Planarization (CMP) slurry classification
  • Bi-component fiber technology with targeted multizone filtration layers enable Large Particle Count (LPC) reduction
  • The rigid filter structure maintains pore size even under intermittent process conditions, providing consistent filtration

Product specifications

Industries
Industries

Biopharmaceutical manufacturing

OverallLengthImperial
OverallLengthImperial

10 in, 20 in, 5 in

Filter Technology
Filter Technology

Non-woven

Micron Rating
Micron Rating

0.05 μm, 70 μm, 0.7 μm

OverallDiameterImperial
OverallDiameterImperial

2.92 in

Product Series
Product Series

AUL

categoryName
categoryName

Cylindrical Depth Filter Cartridges

OverallLengthMetric
OverallLengthMetric

25.4 cm, 50.8 cm, 76.2 cm

End Modification
End Modification

222/Flat Cap, 222 connector, flat cap and EPR o-rings.

Category name
Category name

Cylindrical Depth Filter Cartridges

ProductSeries
ProductSeries

AUL

Trademark2
Trademark2

Betapure™

MicronRating
MicronRating

0.7 μm, 0.05 μm, 50 μm

OverallDiameterMetric
OverallDiameterMetric

7.42 cm

EndModification
EndModification

222 connector, flat cap and EPR o-rings., 222/Flat Cap

Brand
Brand

Betapure™

FilterType
FilterType

Depth

Overall Diameter (Imperial)
Overall Diameter (Imperial)

2.92 in

Overall Length (Imperial)
Overall Length (Imperial)

20 in, 5 in, 10 in, 30 in

Overall Width (Metric)
Overall Width (Metric)

7.416 cm

Overall Length (Metric)
Overall Length (Metric)

25.4 cm, 50.8 cm, 12.7 cm, 127 mm, 76.2 cm

Product Type
Product Type

Filter Cartridge

Overall Diameter (Metric)
Overall Diameter (Metric)

7.42 cm, 74.168 mm

Filter Type
Filter Type

Depth

FilterTechnology
FilterTechnology

Non-woven

Overall Width (Imperial)
Overall Width (Imperial)

2.92 in

Distributors

Solventum Filtration DistributorHeadquarter  LocationContactContact EmailContact PhoneWebsite
A.M. Fluid Equipment, Inc.Bethany, CTRoss Nelsonross.nelson@amfe-filter.com203-393-2360https://amfluid.com/
BMB Filtration Jacksonville, FL Butch Leebutch@bmbent.net904-880-7925 https://bmbfiltration.com/ 
Calhoun & De Jong, Inc.Portland, OR; Seattle, WAEd Calhouned@cdisales.com1-866-288-5091https://cdisales.com/
C.C. Day CompanyMinneapolis, MNChris Magninecmagnine@ccday.com763-350-3415https://ccday.com/
Danner Associates  Rockland, MA Brian Dannerbdanner@dannerassoc.com781-982-7020  
Eggelhof Incorporated Houston, TXBen Ellisbellis@eggelhof.com832-301-0966https://www.eggelhof.com/
Enpro Inc.Addison, ILJohn Burnettjohn_burnett@enproinc.com314-378-6829 https://enpro.com/ 
Filter Equipment Co., Inc.Wall, NJScott Grohscgroh@filter-equipment.com908-216-3879http://www.filter-equipment.com/
George Yardley Company Santa Ana, CARob Yardley rob@georgeyardley.com714-241-7700https://georgeyardley.com/ 
Hagedorn & Gannon Co., Inc.Fenton, MOTy Van Burentvanburen@hgcoinc.com636-349-3370https://www.hgcoinc.com/
Hatfield and Company, Inc.Rockwall, TXJason Reedjreed@hatfieldandcompany.com832-671-9719https://www.hatfieldandcompany.com/
MSC Industrial SupplyMelville, NYJim Keatingjim.keating@mscdirect.com440-656-8042https://www.mscdirect.com/
Rawson Industrial ControlsDaphne, ALMike Mercier mike.mercier@rawsonlp.com404-281-5704https://rawsonicd.com/
Ryan Herco Flow Solutions Santa Ana, CABob Lucasblucas@rhfs.com612-889-9248https://www.rhfs.com/
SunSourceAddison, ILTom Lisy tom.lisy@sunsrce.com440-935-4994https://www.sun-source.com/ 

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3M™ Betapure™ AUL Series

3M™ Betapure™ AUL Series

3M™ Betapure™ AUL Series Filter Cartridges and Capsules represent a new generation in Chemical Mechanical Planarization (CMP) slurry classification providing superior reduction of large particle counts for improved yields. 3M’s bi-component fiber technology with targeted multi-zone filtration layers enable Large Particle Count (LPC) reduction and yield improvement in the most advanced CMP processes.

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